Reflection High Energy Electron Diffraction (RHEED)

 

At a small incident angle, a high energy electron beam is diffracted by the sample surface.  RHEED pattern provides information on the surface structure and morphology of the sample.  In addition, RHHED intensity oscillates as a function of film thickness with each oscillation corresponding to the completion of each atomic layer growth.  The RHEED oscillation enables a precise control of the film thickness on the atomic scale.

 

RHEED Pattern of Co/Cu(100)


RHEED Oscillations recorded during the growth

of six atomic layers of Co on Cu(100)