||Research in accelerator particle physics has driven the development of solid state tracking detectors towards small pixellated cells coupled to fast electronics. For the next generation of experiments at colliders, detectors where the readout electronics is embedded in the same Si wafer which acts as sensitive volume are being developed. These detectors profit of opportunities offered by deep-submicron CMOS commercial processes and provide sensors with sensitive pixels of 1500-6000 micron3 of volume. The resultig detectors, which offer single particle sensitivity over a wide energy range and fast readout capabilities in ultra-thin layers, enable new opportunities in science from particle physics experiments to imaging in electron microscopy and beam diagnostics. This talk will present the status of the R&D program on Thin Monolithic Pixel Sensors carried out at Berkeley, recent results and current applications from particle tracking and vertexing for future colliders to electron microscopy and hadrontherapy.